| 简介 |
PROBLEM TO BE SOLVED : To provide a corrosion-resistant member having excellent corrosion resistance to halogen-based corrosive gases, such as fluorine-based corrosive gases and chlorine-based corrosive gases, and their plasmas.
SOLUTION : The corrosion-resistant member is characterized by that the area thereof to be exposed to the halogen-based corrosive gases or their plasmas is composed of multiple oxides containing aluminum (Al), yttrium (Y) and rare earth elements (RE) excluding the yttrium. |
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