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Bolometer and method for producing bolometer 发明授权

2022-07-31 4280 1074K 0

专利信息

申请日期 2024-11-28 申请号 US10239412
公开(公告)号 US6836677B2 公开(公告)日 2004-12-28
公开国别 US 申请人省市代码 全国
申请人 Mitsubishi Denki Kabushiki Kaisha
简介 A bolometer thin film having a high temperature coefficient of resistance (|TCR|) is produced in a simple and easy production process to provide a highly sensitive infrared sensing element. The invention provides a bolometer using a thin film of an oxide represented by ZyCuOx, wherein Z is one or more alkaline earth metals, one or more rare earth element selected from yttrium and lanthanide elements, one or more elements belonging to Period 5 or Period 6 of the Periodic Table selected from bismuth, lead, thallium, mercury, and cadmium, or potassium or sodium, y is a number satisfying 0≦y≦2, and x is a number satisfying 0.5y


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