| 简介 |
PROBLEM TO BE SOLVED : To provide an Ag alloy reflective film for a reflector and the reflector excellent in surface smoothness and high reflectance even under the heating environment, and to provide a sputtering target for depositing the Ag alloy reflective film.
SOLUTION : (1) The surface roughness Ra of the Ag alloy reflective film for the reflector is ≤ 2.0 nm. (2) The Ag alloy reflective film contains, by atom, 0.1-3.0 % rare earth element (Nd or the like) in total, or further 0.5-5.0 atm.% in total one or more kinds of Au, Pd, Cu or Pt. (3) In the reflector, the Ag alloy reflective film is deposited on a base body. (4) The Ag alloy sputtering target used for depositing the Ag alloy reflective film contains, by atom, 0.1-3.0 % rare earth element, or further 0.5-5.0% in total one or more kinds of Au, Pd, Cu or Pt. |
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