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Method of inhibiting production of projections in metal deposited-film 发明授权

2022-07-31 3690 1140K 0

专利信息

申请日期 2024-11-19 申请号 US10311353
公开(公告)号 US6861089B2 公开(公告)日 2005-03-01
公开国别 US 申请人省市代码 全国
申请人 Takeshi Nishiuchi; Fumiaki Kikui; Yoshimi Tochishita
简介 A method of inhibiting production of projections in a metal deposited-film according to the present invention is characterized by using a vapor deposition apparatus comprising, in a vacuum-treating chamber, an evaporating section for a depositing material, and an accommodating member and/or a holding member for accommodation and/or hold of work pieces, respectively, and, in depositing a metal depositing material on each of the surface of the work pieces with the accommodating member and/or the holding member being made rotated about the horizontal rotational axis thereof, carrying out vapor deposition with a Vickers hardness of a film formed on each of the surface of the work pieces maintained at 25 or more. According to the present invention, production of projections in a metal deposited-film can be effectively inhibited when forming the metal deposited-film of aluminum, zinc or the like on the surface of a work piece such as a rare earth metal-based permanent magnet.


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