| 简介 |
[Issue]Provide substrate holding members that can reduce the variation in the volume resistivity of the electrodes in multiple products manufactured under the same conditions and facilitate electrode design. [Solution means] A substrate holding member 100, which has a substrate mounting surface 112 and is composed of a ceramic sintered body composed mainly of AlN, and a mesh woven with wires, The electrode 120 is formed and buried in the substrate holding member body 110, and the electrode 120 includes W, WC, W2C, Mo, MoC, Or one or more of Mo 2 C as the main component, containing rare earth elements, and the wire has a wire diameter of 0.5 μm. 0.02mm or more 0.5 mm. It is 15 mm or less. [Selection drawing]Fig. 1 |
客服热线：
手机版
二维码
