| 申请日期 | 2024-11-26 | 申请号 | WOUS21056873 |
| 公开（公告）号 | WO2022093974A1 | 公开（公告）日 | 2022-05-05 |
| 公开国别 | WO | 申请人省市代码 | 全国 |
| 申请人 | LAM RESEARCH CORPORATION | ||
| 简介 | A component for use in a plasma processing chamber system is provided. The component for use in a processing chamber system comprises a bulk component body comprising magnesium aluminum oxynitride and sintering aids. The sintering aids comprise at least one of yttria, yttrium aluminate, rare earth metal oxide, and rare earth metal aluminate. | ||
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