| 申请日期 | 2024-11-26 | 申请号 | KR1020200143680 |
| 公开（公告）号 | KR1020220058191A | 公开（公告）日 | 2022-05-09 |
| 公开国别 | KR | 申请人省市代码 | 全国 |
| 申请人 | 솔브레인 주식회사 | ||
| 简介 | The present invention provides a structure in which n cyclopentadienyl (Cp) ligand and m linear amine ligand (1≤n≤2, 1≤ m≤2, n + m = 3) are coordinated to the central metal, wherein the central metal is a rare earth element or ruthenium (Lu) Group 3 metal precursor compound and a metal-containing thin film using the same It has the effect. | ||
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