| 申请日期 | 2025-02-24 | 申请号 | US15814597 |
| 公开（公告）号 | US20180073125A1 | 公开（公告）日 | 2018-03-15 |
| 公开国别 | US | 申请人省市代码 | 全国 |
| 申请人 | Applied Materials Inc | ||
| 简介 | An article comprises a body and at least one protective layer on at least one surface of the body. The at least one protective layer is a thin film having a thickness of less than approximately 20 microns that comprises a ceramic selected from a group consisting of Y3Al5O12, Y4Al2O9, Er2O3, Gd2O3, Er3Al5O12, Gd3Al5O12 and a ceramic compound comprising Y4Al2O9 and a solid-solution of Y2O3—ZrO2. | ||
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