| 简介 |
PROBLEM TO BE SOLVED : To provide a solid sintered ceramic article with excellent plasma resistance.
SOLUTION : A solid sintered ceramic article may include a solid solution comprising Y2O3 at a concentration of approximately 30 mol% to approximately 60 mol%, Er2O3 at a concentration of approximately 20 mol% to approximately 60 mol%, and at least one of ZrO2, Gd2O3, and SiO2 at a concentration of approximately 0 mol% to approximately 30 mol%. Alternatively, the solid sintered ceramic article includes a solid solution comprising 40-100 mol% of Y2O3, 0-50 mol% of ZrO2, and 0-40 mol% of Al2O3.
SELECTED DRAWING : Figure 2
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