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RARE-EARTH OXIDE BASED EROSION RESISTANT COATINGS FOR SEMICONDUCTOR APPLICATION 发明申请

2022-06-06 4660 525K 0

专利信息

申请日期 2025-02-25 申请号 US15835923
公开(公告)号 US20180102237A1 公开(公告)日 2018-04-12
公开国别 US 申请人省市代码 全国
申请人 Applied Materials Inc
简介 An article includes a body that is coated with a ceramic coating. The ceramic coating may include Y2O3 in a range between about 45 mol % to about 99 mol %, ZrO2 in a range between about 0 mol % to about 55 mol %, and Al2O3 in a range between about 0 mol % to about 10 mol %. The ceramic coating may alternatively include Y2O3 in a range between about 30 mol % to about 60 mol %, ZrO2 in a range between about 0 mol % to about 20 mol %, and Al2O3 in a range between about 30 mol % to about 60 mol %.


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