| 申请日期 | 2025-02-26 | 申请号 | US15844251 |
| 公开（公告）号 | US20180105922A1 | 公开（公告）日 | 2018-04-19 |
| 公开国别 | US | 申请人省市代码 | 全国 |
| 申请人 | Applied Materials Inc | ||
| 简介 | An article comprises a body and a conformal protective layer on at least one surface of the body. The conformal protective layer is a plasma resistant rare earth oxide film having a thickness of less than 1000 μm, wherein the plasma resistant rare earth oxide film consists essentially of 40 mol % to less than 100 mol % of Y2O3, over 0 mol % to 60 mol % of ZrO2, and 0 mol % to 9 mol % of Al2O3. | ||
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