| 简介 |
[Problem]Aluminum nitride sintered body and electrostatic chuck excellent in insulation in the high temperature region are provided. Solution : Aluminum nitride (AlN) is the main component, includes a composite oxide (R-Al composite oxide) containing rare earth elements and aluminum, magnesium oxide (MgO), and between the particles of aluminum nitride, the R-Al composite oxide and the magnesium oxide are present, and the volume resistivity at 600 ° C. is 1.55% 0× 109Ωcm or more 1.00 1. Aluminum nitride sintered body that is 0×1012 Ωcm or less. [Selection Figure]Figure 2 |
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