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NANOPOWDERS, NANOCERAMIC MATERIALS AND METHODS OF MAKING AND USE THEREOF 发明申请

2022-06-02 2290 1341K 0

专利信息

申请日期 2025-04-18 申请号 KR1020227010278
公开(公告)号 KR1020220045059A 公开(公告)日 2022-04-12
公开国别 KR 申请人省市代码 全国
申请人 어플라이드 머티어리얼스 인코포레이티드
简介 Nanopowders containing nanoparticles having a core particle with a thin film coating. The core particles and thin film coatings are, independently, formed from at least one of a rare earth metal-containing oxide, a rare earth metal-containing fluoride, a rare earth metal-containing oxyfluoride or combinations thereof. The thin film coating may be formed using a non-line of sight technique such as atomic layer deposition (ALD). Also disclosed herein are nanoceramic materials formed from the nanopowders and methods of making and using the nanopowders.


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